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牧村 哲也

Makimura, Tetsuya

数理物質系 , 准教授
Institute of Pure and Applied Sciences , Associate Professor

http://www.bk.tsukuba.ac.jp/~makimura/

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  1. 1. Micrometer-Scale Photo-Direct Machining of Polydimethylsiloxane Using Laser Plasma EUV Radiations H. Urai; T. Makimura; M. Ogawa
      Springer Proceedings in Physics 202: 383 (2018) Semantic Scholar
  2. 2. Evaluation of a flat-field grazing incidence spectrometer for highly charged ion plasma emission in soft x-ray spectral region from 1 to 10 nm Thanh Hung Dinh; Yoshiki Kondo; Toshiki Tamura; Yuichi Ono (+12 著者) Takeshi Higashiguchi
      REVIEW OF SCIENTIFIC INSTRUMENTS 87: (2016) Semantic Scholar
  3. 3. Soft X-ray emission from molybdenum plasmas generated by dual laser pulses Ragava Lokasani; Goki Arai; Yoshiki Kondo; Hiroyuki Hara (+9 著者) Jiri Limpouch
      APPLIED PHYSICS LETTERS 109: (2016) Semantic Scholar
  4. 4. 高パワー密度狭帯域軟X線加工装置の開発とシリコーンゴムの微細加工 鳥居, 周一; 牧村, 哲也; 村上, 浩一; 岡崎, 功太 (+3 著者) 新納, 弘之
      電気学会研究会資料. OQD, 光・量子デバイス研究会 2012: 5 (2012)
  5. 5. 国際会議報告 LPM2011会議報告 杉岡, 幸次; 新納, 弘之; 牧村, 哲也
      レーザ加工学会誌 19: 42 (2012)
  6. 6. Silica ablation process induced by focused laser plasma soft x-rays Tetsuya, Makimura; Shuichi, Torii; Hiroyuki, Niino; Kouichi, Murakami
      Proceedings of SPIE 8206: (2012) Semantic Scholar
  7. 7. Ablation of Silica Glass Induced by Laser Plasma Soft X-Ray Irradiation Tetsuya Makimura; Takashige Fujimori; Shuichi Torii; Hiroyuki NiinoKouichi Murakami
      ELECTRONICS AND COMMUNICATIONS IN JAPAN 94: 30 (2011) Semantic Scholar
  8. 8. Sub-wavelength micromachining of silica glass by irradiation of CO2 laser with Fresnel diffraction K. Okazaki; S. Torii; T. Makimura; H. Niino (+3 著者) T. Okada
      APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING 104: 593 (2011) Semantic Scholar
  9. 9. Micromachining of Polymethylmethacrylate and Polydimethylsiloxane Using Laser Plasma Soft X-rays S., Torii; K., Okazaki; D., Nakamura; T., Makimura (+2 著者) K., Murakami
      Journal of Laser Micro/Nanoengineering 6: 235-238 (2011)
  10. 10. XUV-X線による材料加工 牧村, 哲也; 新納, 弘之; 鳥居, 周一; 村上, 浩一
      レーザー研究 38: 957 (2010)
  11. 11. レーザープラズマ軟X線によるシリカガラスのアブレーションメカニズム 鳥居, 周一; 牧村, 哲也; 新納, 弘之; 村上, 浩一
      レーザー研究 38: 987 (2010)
  12. 12. Micromachining of Transparent Materials with Fresnel Diffraction of Infrared Radiation K. Okazaki; S. Torii; T. Makimura; H. Niino (+3 著者) T. Okada
      JOURNAL OF LASER MICRO NANOENGINEERING 5: 269 (2010) Semantic Scholar
  13. 13. Micromachining of Silica Glass Using EUV Radiation of Laser-Produced Plasma (特集 量子ビームによるナノバイオエレクトロニクス) Takahashi, Akihiko; Torii, Shuichi; Makimura, Tetsuya; Murakami, Kouichi (+3 著者) Niino, Hiroyuki
      IEEJ Transactions on Electronics, Information and Systems 130: 1779 (2010) Semantic Scholar
  14. 14. Micromachining of silica glass using EUV radiation of laser-produced plasma A., Takahashi; S., Torii; T., Makimura; K., Murakami (+3 著者) H., Niino
      IEEJ Trans. EIS 130: 1779-1783 (2010)
  15. 15. Nano- and micromachining using laser plasma soft X-rays Tetsuya, Makimura; Shuichi, Torii; Hiroyuki, Niino; Kouichi, Murakami
      Journal of Nanophotonics 4: 040305 (2010) Semantic Scholar
  16. 16. Direct Etching of Poly(methyl methacrylate) Using Laser Plasma Soft X-rays Shuichi Torii; Tetsuya Makimura; Kouta Okazaki; Daisuke Nakamura (+3 著者) Kouichi Murakami
      APPLIED PHYSICS EXPRESS 3: (2010) Semantic Scholar
  17. 17. レーザー生成EUV光によるシリカガラスのアブレーション 鳥居, 周一; 牧村, 哲也; 新納, 弘之; 村上, 浩一
      レーザー学会研究会報告 = Reports on the Topical meeting of the Laser Society of Japan 394: 27 (2009)
  18. 18. 赤外レーザーと近接場光を組み合わせたシリカガラスの微細加工 岡崎, 功太; 鳥居, 周一; 牧村, 哲也; 新納, 弘之 (+3 著者) 岡田, 龍雄
      レーザー学会研究会報告 = Reports on the Topical meeting of the Laser Society of Japan 395: 23 (2009)
  19. 19. レーザープラズマ軟X線アブレーションによる微細加工 牧村, 哲也; 鳥居, 周一; 新納, 弘之; 村上, 浩一
      Journal of The Surface Finishing Society of Japan 60: 687 (2009)
  20. 20. Ablation process of silica glass induced by laser plasma soft X-ray irradiation Shuichi Torii; Takashige Fujimori; Tetsuya Makimura; Hiroyuki NiinoKouichi Murakami
      APPLIED SURFACE SCIENCE 255: 9840 (2009) Semantic Scholar
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  1. 1. Ablation of polydimethylsiloxane elastomer using laser-plasma EUV radiation Oguchi, Kotaro; Kira, Erika; Urai, Hirari; Makimura, Tetsuya
    16th International Conference on Laser Ablation 2022年4月24日
  2. 2. High-aspect micromachining of PDMS sheets using laser plasma EUV radiation Makimura, Tetsuya
    The 22nd International Symposium on Laser Precision Microfabrication 2021年6月8日 Japan Laser Processing Society
  3. 3. Microfabrication of PDMS structures based on wave optics using EUV radiations from laser-produced plasma Makimura, Tetsuya; Urai, Hikari; Kira, Eriko; Niino, Hiroyuki
    The 8th International Congress on Laser Advanced Materials Processing 2019年5月21日
  4. 4. Microfabrication of PDMS structures based on wave optics using EUV radiations from laser-produced plasma Makimura, Tetsuya; Urai, Hikari; Kira, Eriko; Niino, Hiroyuki
    The 8th International Congress on Laser Advanced Materials Processing 2019年5月21日
  5. 5. Microfabrication of PDMS structures based on wave optics using EUV radiations from laser-produced plasma Makimura, Tetsuya; Urai, Hikari; Kira, Eriko; Niino, Hiroyuki
    The 8th International Congress on Laser Advanced Materials Processing 2019年5月21日
  6. 6. Silica ablation process induced by nanosecond EUV irradiation Makimura, Tetsuya; Torii, Shuichi; Niino, Hiroyuki
    SPIE Optics + Optoelectronics 2019 2019年4月1日 招待有り
  7. 7. Silica nano-ablation mechanism under irradiation with nanosecond EUV radiation Makimura, Tetsuya; Torii, Shuichi; Niino, Hiroyuki
    SPIE Photonics West 2019年2月2日 SPIE
  8. 8. LPP EUV光によるPDMSの高アスペクトマイクロ加工 牧村,哲也
    第14回Ｘ線結像光学シンポジウム 2017年11月29日
  9. 9. Micrometer-scale photo direct machining of PDMS using laser plasma EUV light Makimura, Tetsuya; Urai, Hikari; Niino, Hiroyuki
    The 18th International Symposium on Laser Precision Microfabrication 2017年6月5日 LPM2017 Organizing Committee
  10. 10. Photo-direct machining of polymers using laser plasma EUV sources Makimura,Tetsuya
    Pacific Rim Laser Damage 2017年5月21日 招待有り
  11. 11. Micrometer-Scale Photo-Direct Machining of Polydimethylsiloxane Using Laser Plasma EUV Radiations Urai, H; Makimura, T; Ogawa, M
    15th International Conference on X-Ray Lasers (ICXRL) 2016年5月22日
  12. 12. Responses of organic and inorganic materials to intense EUV radiation from laser-produced plasmas Makimura, Tetsuya; Torii, Shuichi; Nakamura, Daisuke; Takahashi, Akihiko; Okada, Tatsuo; Niino, Hiroyuki; Murakami, Kouichi
    Conference on Damage to VUV, EUV, and X-ray Optics IV; and EUV and X-ray Optics - Synergy between Laboratory and Space III 2013年4月15日
  13. 13. Responses of polymers to laser plasma EUV light beyond ablation threshold and micromachining Makimura, Tetsuya; Torii, Shuichi; Okazaki, Kota; Nakamura, Daisuke; Takahashi, Akihiko; Niino, Hiroyuki; Okada, Tatsuo; Murakami, Kouichi
    Conference on Damage to VUV, EUV, and X-ray Optics III 2011年4月18日
  14. 14. レーザープラズマ軟Ｘ線による透明材料の微細加工法の探索 鳥居, 周一; 牧村, 哲也; 新納, 弘之; 高橋, 昭彦; 岡崎, 功太; 秋山智哉; 中村, 大輔; 岡田, 龍雄; 村上, 浩一
    電気学会研究会資料 光・量子デバイス研究会__OQD-09-42__49-53 2009年
  15. 15. Ablation of inorganic materials using laser plasma soft X-rays Tetsuya, Makimura; Satoshi, Uchida; Takashige, Uchida; Kouichi, Murakami; and; Hiroyuki Niino
    Optics and Optoelectronics 2007 (Prague)INVITED PAPER____ 2007年4月
  16. 16. Ablation of inorganic materials using laser plasma soft X-rays Tetsuya, Makimura; Satoshi, Uchida; Takashige, Uchida; Kouichi, Murakami; and; Hiroyuki Niino
    Optics and Optoelectronics 2007 (Prague)INVITED PAPER____ 2007年4月
  17. 17. Silica nanomachining using laser plasma soft X-rays Tetsuya, Makimura; Satoshi, Uchida; Takashige, Fujimori; Hiroyuki, Niino; and; Kouichi Murakami
    The 8th International Conference on Laser Precision Microfabrication (Vienna)____ 2007年4月
  18. 18. Silica nanomachining using laser plasma soft X-rays Tetsuya, Makimura; Satoshi, Uchida; Takashige, Fujimori; Hiroyuki, Niino; and; Kouichi Murakami
    International Conference on Nanoelectronics, Nanostructures and Carrier Interactions (Atsugi)____ 2007年2月
  19. 19. Direct nanomachining of inorganic transparent materials using laser plasma soft X-rays Tetsuya, Makimura; Hisao, Miyamoto; Satoshi, Uchida; Takashige, Fujimori; Kouichi, Murakami; Hiroyuki, Niino
    The 4th International Conference on Laser Advanced Materials Processing____ 2006年5月
  20. 20. Three-dimensional PDMS surface structures after EUV ablation MAKIMURA, Tetsuya
    The 9th International Congress on Laser Advanced Materials Processing Japan Laser Processing Society
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