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牧村 哲也
Makimura, Tetsuya
数理物質系 , 准教授 Institute of Pure and Applied Sciences , Associate Professor
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61.
Nanomachining of Inorganic Transparent Materials by an X-Ray Exciton Method
牧村, 哲也
Abst. of 7th International Conference on Laser Ablation 5662: MoPS18 (2003) Semantic Scholar
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62.
Impurity Doping Effects in Si Nanocrystallites in SiO2
牧村, 哲也
Proc. of International Symposium of Synthetic Nano-Function Materials Project 223-226 (2003)
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63.
Microfabrication of Quartz Plates using the X-Ray Exciton Method
牧村, 哲也
The Papers of Technical Meeting on Optical and Quantum Devices, IEE Japan OQD-03-16: 27-30 (2003)
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64.
Deveopment of Detection Method and Formation Process of as-Suspended Si Nanoparticles
牧村, 哲也
The Papers of Technical Meeting on Optical and Quantum Devices, IEE Japan OQD-03-11,: /1-4 (2003)
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65.
Optical excitation of Er iions with 1.5 micro m luminescence via the luminescent state in Si nanocrystallites embedded in SiO2 matrices
Tetsuya, Makimura; Keiichi, Kondo; Hiroshi, Uematsu; Changqing, LiKouichi, Murakami
Applied Physics Letters 83: 5422-5424 (2003)
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66.
Time- and Space-Resolved Soft X-Ray Absorption Spectroscopy for Laser Plasma of Silicon
牧村, 哲也
Abst. of Photon Technology Workshop L-49 (2002)
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67.
Hydrogenation Dynamics of Si Nanoparticles with Green Photoluminescence
牧村, 哲也
Appl. Surf. Sci. 197-198: 574-576 (2002) Semantic Scholar
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68.
Deposition Dynamics of Droplet-Free Si Nanoparticles in Ar Gas using Laser Ablation
牧村, 哲也
Appl. Surf. Sci. 197-198: 674-678 (2002) Semantic Scholar
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69.
Phosphorus-Doped Si Nanocrystallites embedded in SiO2 Films
牧村, 哲也
Appl. Surf. Sci. 197-198: 670 (2002) Semantic Scholar
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70.
`Fabrication of Er-doped Si Nanocrystallites without Thermal Quenching of 1.5 micro m photoluminescence
牧村, 哲也
Appl. Surf. Sci. 197-198: 607-609 (2002) Semantic Scholar
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71.
Dynamics of Hydrogenation of Si Nanoparticles Formed by Laser Ablation
牧村, 哲也
Proc. of International Symposium on Manipulation of Atoms and Molecules by Electronic Excitations 96 (2002)
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72.
Dynamics of Chemically-Reacted Si Nanoparticles Formed by Laser Ablation
牧村, 哲也
The 5th AIST International Symposium on Photoreaction Control and Photofunctional Materials 172-173 (2002)
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73.
Deposition Dynamics for Droplet-Free Si Nanoparticle Films Using Laser Ablation
牧村, 哲也
The 5th AIST International Symposium on Photoreaction Control and Photofunctional Materials 184-185 (2002)
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74.
Symthesis of Si Nanoparticles and Formation Dymanics
牧村, 哲也
Proc. of International Symposium of Synthetic Nano-Function Materials Project 56-59 (2002)
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75.
Fabrication of Silicon Nanoparticles by Laser Ablation and Optical Properties
牧村, 哲也
Proc. of Plasma Science Symposium 2001 and The 18th Symposium on Plasma Processing 251-252 (2001)
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76.
Synthesis of Silicon Nanoparticles and Impurity Doping by Laser Ablation
牧村, 哲也
SPIE Proc. 4274: 222-231 (2001)
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77.
Visible Photoluminescence from Chemically-Modified Si Nanoparticles Synthesized by Laser Ablation
牧村, 哲也
Extended Abstracts of The 4th NIMC International Symposium on Photoreaction Control and Photofunctional Materials 174-175 (2001)
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78.
1.5-micro m Photoluminescence of Er-Doped Silicon Nanocrystallites Fabricated by Laser Ablation
牧村, 哲也
Extended Abstracts of The 4th NIMC International Symposium on Photoreaction Control and Photofunctional Materials 260-261 (2001)
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79.
Enhanced Light Emission from Doped Si Nanocrystallites Fabricated by Laser Ablation
牧村, 哲也
Extended Abstracts of The 4th NIMC International Symposium on Photoreaction Control and Photofunctional Materials 262-263 (2001)
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80.
Selective Adsorption and Patterning of Si Nanoparticles Fabricated by Laser Ablation on Functionalized Self-Assembled Monolayer
牧村, 哲也
Appl. Phys. Lett. 79: 692-694 (2001)
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1.
Handbook of Laser Micro- and Nano-Engineering
Makimura,Tetsuya
(担当:分担執筆, 範囲:Optics and Apparatus for Excimer Laser/EUV Microprocessing)
Springer Nature Switzerland AG 2020年1月 (ISBN: 9783319695372)
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2.
Laser Applications in Microelectronic and Optoelectronic Manufactoring (LAMOM) XXIV
Makimura,Tetsuya
SPIE 2019年3月 (ISBN: 9781510624528)
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3.
レーザープラズマ軟X線によるシリカガラスのアブレーションメカニズム
鳥居, 周一; 牧村, 哲也; 新納, 弘之; 村上, 浩一
(担当:監修)
レーザー研究 2010年1月
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4.
レーザープラズマ軟X線アブレーションによる微細加工表面技術
牧村哲也; 鳥居周一; 新納弘之; 村上浩一
(担当:監修)
表面技術 2009年11月
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5.
2009 LASERS & ELECTRO-OPTICS & THE PACIFIC RIM CONFERENCE ON LASERS AND ELECTRO-OPTICS, VOLS 1 AND 2
Makimura, Tetsuya; Torii, Shuichi; Niino, Hiroyuki; Murakami, Kouichi
(担当:分担執筆, 範囲:Nano- and micromachining of transparent materials using laser plasma soft X-Rays)
IEEE 2009年1月 (ISBN: 9781424438297)
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6.
最新レーザプロセッシングの基礎と産業応用
牧村哲也他共著; 牧村, 哲也
電気学会 2007年3月
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7.
COLA'05: 8TH INTERNATIONAL CONFERENCE ON LASER ABLATION
Makimura, Tetsuya; Miyamoto, Hisao; Uchida, Satoshi; Niino, Hiroyuki; Murakami, Kouichi
(担当:分担執筆, 範囲:Direct nanomachining of inorganic transparent materials using laser plasma soft x-rays)
IOP PUBLISHING LTD 2007年1月
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8.
COLA'05: 8th International Conference on Laser Ablation
Makimura, Tetsuya; Uematsu, Hiroshi; Okada, Yuuki; Murakami, Kouichi
(担当:分担執筆, 範囲:1.5 mu m light emission of Er 31 ions doped in SiO2 films including Si nanocrystallites and in SiOx films)
IOP PUBLISHING LTD 2007年1月
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9.
Damage to VUV, EUV, and X-ray Optics
Makimura, Tetsuya; Fujimori, Takashige; Uchida, Satoshi; Murakami, Kouichi; Niino, Hiroyuki
(担当:分担執筆, 範囲:Ablation of inorganic materials using laser plasma soft X-rays)
SPIE-INT SOC OPTICAL ENGINEERING 2007年1月 (ISBN: 9780819467140)
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10.
ガラスの微細加工
牧村哲也
(担当:監修)
2006年度光技術動向調査報告書 (光産業技術振興協会) 2007年1月
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11.
Photon Processing in Microelectronics and Photonics IV
Makimura, T; Kenmotsu, Y; Miyamoto, H; Uchida, S; Niino, H; Murakami, K
(担当:分担執筆, 範囲:Micromachining of inorganic transparent materials using pulsed laser plasma soft X-rays at 10 nm)
SPIE-INT SOC OPTICAL ENGINEERING 2005年1月
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12.
科学大辞典
牧村哲也他共著; 牧村, 哲也
丸善 2005年1月
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13.
レーザーとナノ物性---レーザアブレーションで創製したSiナノ構造の物性---
村上浩一; 牧村哲也; 深田直樹
(担当:監修)
レーザー研究 2005年1月
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14.
レーザーマイクロ・ナノプロセッシング
牧村哲也他; 牧村, 哲也
シーエムシー出版 2004年1月
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15.
レーザーマイクロ・ナノ プロセシング
牧村, 哲也
シーエムシー出版 2004年1月
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16.
レーザーアブレーション法による可視発光Siナノ微粒子の生成ダイナミックスと表面修飾
水田泰治; 牧村哲也; 村上浩一
(担当:監修)
レーザ加工学会誌 2003年1月
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17.
1.54-micro m Photoluminescence of Er-Doped Silicon Nanoparticles Fabricated by Laser Ablation
牧村, 哲也
2000年1月
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18.
Formation of Si Nanoparticles Observed by Time-Resolved Imaging using a Laser Decomposition Method
牧村, 哲也
2000年1月
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19.
Doping of Si Functional Impurities in Si Nanoparticles Using Laser Ablation
牧村, 哲也
2000年1月
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20.
Si Nanoparticles in SiO2 with Intense Visible Photoluminescence Synthesized from SiOx Film Deposited by Laser Ablation
牧村, 哲也
2000年1月
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1.
Ablation of polydimethylsiloxane elastomer using laser-plasma EUV radiation
Oguchi, Kotaro; Kira, Erika; Urai, Hirari; Makimura, Tetsuya
16th International Conference on Laser Ablation 2022年4月24日
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2.
High-aspect micromachining of PDMS sheets using laser plasma EUV radiation
Makimura, Tetsuya
The 22nd International Symposium on Laser Precision Microfabrication 2021年6月8日 Japan Laser Processing Society
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3.
Microfabrication of PDMS structures based on wave optics using EUV radiations from laser-produced plasma
Makimura, Tetsuya; Urai, Hikari; Kira, Eriko; Niino, Hiroyuki
The 8th International Congress on Laser Advanced Materials Processing 2019年5月21日
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4.
Microfabrication of PDMS structures based on wave optics using EUV radiations from laser-produced plasma
Makimura, Tetsuya; Urai, Hikari; Kira, Eriko; Niino, Hiroyuki
The 8th International Congress on Laser Advanced Materials Processing 2019年5月21日
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5.
Microfabrication of PDMS structures based on wave optics using EUV radiations from laser-produced plasma
Makimura, Tetsuya; Urai, Hikari; Kira, Eriko; Niino, Hiroyuki
The 8th International Congress on Laser Advanced Materials Processing 2019年5月21日
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6.
Silica ablation process induced by nanosecond EUV irradiation
Makimura, Tetsuya; Torii, Shuichi; Niino, Hiroyuki
SPIE Optics + Optoelectronics 2019 2019年4月1日 招待有り
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7.
Silica nano-ablation mechanism under irradiation with nanosecond EUV radiation
Makimura, Tetsuya; Torii, Shuichi; Niino, Hiroyuki
SPIE Photonics West 2019年2月2日 SPIE
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8.
LPP EUV光によるPDMSの高アスペクトマイクロ加工
牧村,哲也
第14回X線結像光学シンポジウム 2017年11月29日
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9.
Micrometer-scale photo direct machining of PDMS using laser plasma EUV light
Makimura, Tetsuya; Urai, Hikari; Niino, Hiroyuki
The 18th International Symposium on Laser Precision Microfabrication 2017年6月5日 LPM2017 Organizing Committee
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10.
Photo-direct machining of polymers using laser plasma EUV sources
Makimura,Tetsuya
Pacific Rim Laser Damage 2017年5月21日 招待有り
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11.
Micrometer-Scale Photo-Direct Machining of Polydimethylsiloxane Using Laser Plasma EUV Radiations
Urai, H; Makimura, T; Ogawa, M
15th International Conference on X-Ray Lasers (ICXRL) 2016年5月22日
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12.
Responses of organic and inorganic materials to intense EUV radiation from laser-produced plasmas
Makimura, Tetsuya; Torii, Shuichi; Nakamura, Daisuke; Takahashi, Akihiko; Okada, Tatsuo; Niino, Hiroyuki; Murakami, Kouichi
Conference on Damage to VUV, EUV, and X-ray Optics IV; and EUV and X-ray Optics - Synergy between Laboratory and Space III 2013年4月15日
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13.
Responses of polymers to laser plasma EUV light beyond ablation threshold and micromachining
Makimura, Tetsuya; Torii, Shuichi; Okazaki, Kota; Nakamura, Daisuke; Takahashi, Akihiko; Niino, Hiroyuki; Okada, Tatsuo; Murakami, Kouichi
Conference on Damage to VUV, EUV, and X-ray Optics III 2011年4月18日
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14.
レーザープラズマ軟X線による透明材料の微細加工法の探索
鳥居, 周一; 牧村, 哲也; 新納, 弘之; 高橋, 昭彦; 岡崎, 功太; 秋山智哉; 中村, 大輔; 岡田, 龍雄; 村上, 浩一
電気学会研究会資料 光・量子デバイス研究会__OQD-09-42__49-53 2009年
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15.
Ablation of inorganic materials using laser plasma soft X-rays
Tetsuya, Makimura; Satoshi, Uchida; Takashige, Uchida; Kouichi, Murakami; and; Hiroyuki Niino
Optics and Optoelectronics 2007 (Prague)INVITED PAPER____ 2007年4月
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16.
Ablation of inorganic materials using laser plasma soft X-rays
Tetsuya, Makimura; Satoshi, Uchida; Takashige, Uchida; Kouichi, Murakami; and; Hiroyuki Niino
Optics and Optoelectronics 2007 (Prague)INVITED PAPER____ 2007年4月
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17.
Silica nanomachining using laser plasma soft X-rays
Tetsuya, Makimura; Satoshi, Uchida; Takashige, Fujimori; Hiroyuki, Niino; and; Kouichi Murakami
The 8th International Conference on Laser Precision Microfabrication (Vienna)____ 2007年4月
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18.
Silica nanomachining using laser plasma soft X-rays
Tetsuya, Makimura; Satoshi, Uchida; Takashige, Fujimori; Hiroyuki, Niino; and; Kouichi Murakami
International Conference on Nanoelectronics, Nanostructures and Carrier Interactions (Atsugi)____ 2007年2月
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19.
Direct nanomachining of inorganic transparent materials using laser plasma soft X-rays
Tetsuya, Makimura; Hisao, Miyamoto; Satoshi, Uchida; Takashige, Fujimori; Kouichi, Murakami; Hiroyuki, Niino
The 4th International Conference on Laser Advanced Materials Processing____ 2006年5月
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20.
Micrometer-scale high-aspect machining of PDMS elastomer using laser plasma EUV radiation
MAKIMURA, Tetsuya
The 23th International Symposium on Laser Precision Microfabrication Japan Laser Processing Society
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1. : 光パターニングによる無機透明材料を加工する光加工装置及び光加工方法
牧村哲也 -
2. : シリコンナノパーティクルのパターニング方法及びこの方法に用いる有機分子
重川秀実; 畠賢治; 村上浩一; 牧村哲也 -
3. : Photo-machining appratus and photo-machining methods for machining inorganic transparent materials using photo-patterning
牧村哲也 -
4. PCT/JP02/11813: Photo machining apparatus and photo machining methods for machining inorganic transparent materials using photo-pattering
牧村哲也 -
5. 特願2004-034343: 軟X線加工装置及び軟X線加工法
牧村哲也; 村上浩一
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